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電阻真空計 INFICON Capacitance Diaphragm Gauge

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  • 公司名稱安徽貝意克設備技術有限公司
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  • 更新時間2024/10/28 19:41:11
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安徽貝意克設備技術有限公司成立于2012年,隸屬百思集團,其平行公司有百思新材料研究院有限公司、合肥萊德裝備技術有限公司、天津百諾金科技有限公司、合肥歐萊迪光電技術有限公司、安徽貝意克智能科技有限公司。貝意克公司于2020年在合肥投資5億元新建5萬平米貝意克智能裝備產業園。設有貝意克工程設計中心,貝意克工程技術中心,貝意克聯合實驗室等研發公共服務平臺。貝意克主要從事實驗室儀器設備的研發生產,主營各類型箱式爐、管式爐、CVD、PECVD、 ALD、 PVD磁控濺射、真空鍍膜、薄膜制備、納米材料制備裝備、各種高精度真空箱以及各類非標定制,產品領域涉及科研、光電產業化、半導體、等高科技產業。公司致力于提供專業的設備、技術和服務,助力新材料研發。
真空計
ThisisaPiraniCapacitanceDiaphragmGauge(EQ-PGC-554)combinesthepatentedceramiccapacitancediaphragmsensortechnologywiththeadvantagesofaPiranigaugeinasingleproduct
電阻真空計 INFICON Capacitance Diaphragm Gauge 產品信息

  This is a Pirani Capacitance Diaphragm Gauge (EQ-PGC-554) combines the patented ceramic capacitance diaphragm sensor technology with the advantages of a Pirani gauge in a single product. In the measurement range between 10 mbar and atmosphere, the capacitance diaphragm technology provides gas-type independent, highly accurate values for reliable pressure measurement.

  With the need to factor gas type dependency into the pressure reading output being eliminated, risks of explosions in tube vessels or other chambers due to incorrect display of pressure AND/OR negligence of adjustment for gas types ARE GREATLY REDUCED.

Features

Designed and made by Switzerland-based INFICON

Gas-type independent above 10 mbar - allows safe venting with any gas mixture

High accuracy and reproducibility at atmosphere for reliable atmospheric pressure detection

Fast atmospheric detection eliminates waiting time and shortens process cycle

Versatile mounting orientation provides engineering freedom in tool design

fully ceramic coated sensor unit for highly corrosive applications

Easy to exchange plug & play sensor element with onboard calibration data guarantees high reproducibility and low cost of ownership        

Power Connection

9 pins D-sub connector. 

Power Adapter

One 15 VDC power adapter is included and ready to use. Input voltage for the adapter is 110~240 V.

Measurement Range

3.8E-5 to 1125 Torr.

Accuracy

?5×10-4 … 1×10-3 mbar (N2) ±50% of reading

1×10-3 … 100 mbar (N2) ±15% of reading 

100 … 950 mbar ±5% of reading 

950 … 1050 mbar ±2.5% of reading 

Display

Digital display (20x14 mm) with measurement unit Torr 

Gauge Fitting

Small Foot-Print with KF16 port

Dimensions

46 mm×28 mm×126 mm (L x W x H)

Shipping Weight

5 lbs

Warranty

One year limited manufacturer warranty, please contact  vc.service.usa for information.

In the case of severe contamination or malfunction, the sensor can be replaced, please read the?instruction?for details. Replacement sensor is offered at $574/each)

Calibration

The pressure gauge is manufactured calibrated base on PTB / METAS (German / Swiss NIST) standards. Calibration data is available upon request.

Application Notes

General vacuum measurement and control in the Medium Vacuum Range (Range 1.0E-4 Torr to ATM).

Pirani gauges used in a clean environment can effectively operate above 5.0E-5 Torr range. 

If your tool requires effective reading in the 1.0E-5 Torr or lower, please select Pirani/Cold Cathode gauge with measurement range from 3.75E-9 to 760 Torr

Optional: M14 to KF16 adapter is needed for the use with MTI vacuum flanges, please click pic below to order replacement part

By connecting to a set of Solenoid Valves, this gauge can also be used with a pressure control system to keep the pressure constant in a vacuum system.

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