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上海爾迪儀器科技有限公司
上海爾迪儀器科技有限公司
Large capacity available
by combination.
Larger than 150kL/min
also available on demand.
Large capacity around atm. pressure can achieve high speed pumping best for large L/L chamber.
Pumps for solvent evacuation are also lined-up
| Spec. / Products | SDL12E50 | SDL20E50 | SDL36M60 | SDL40E60 | SDL40E201 | SDL40EW201 | SDL80201 |
| Max. pumping speed [L/min] *1 | 25,000 | 50,000 | 60,000 | 70,000 | 80,000 | 150,000 | 170,000 |
| Ultimate pressure [Pa] *1 | 0.8 | 0.5 | 0.8 | 5.0 | |||
| Supply voltage (50/60Hz) | 3Phase AC200～220V,?380～480V | 3Phase AC380～440V | |||||
*1) Without N2 purge.
* Contact us about international standard compliance. Spec. & name of products are subject to change without prior notice.
* S-P curves vary by combination.
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